| Data set information | |
| Short name | Originaldokumentation von 'Fabrik\Silizium-Wafer-multi-DE-2005' |
| Publication type | Undefined |
| Link to digital file | |
| Data entry by | |
| Time stamp (last saved) | 2020-09-15T08:56:48 |
| Publication and ownership | |
| UUID | 1c1352a3-2283-4136-8ba8-2474e483b847 |
| Data set version | 02.44.152 |
| Owner of data set | |